3-Axis Cylindrical Coordinate Clean Robot SCR3000CS Series
It is suitable for wafer transport in semiconductor manufacturing equipment, inspection devices, etc.
The SCR3000CS series of three-axis cylindrical coordinate clean robots for super clean rooms is suitable for wafer transport within semiconductor manufacturing equipment and inspection devices. Depending on the equipment layout, you can choose between base type and flange type, and the S-curve acceleration and deceleration control allows for high-speed and high-precision wafer transport. For more details, please contact us or refer to the catalog.
- 企業:ジェーイーエル
- 価格:Other